* Product images and drawings are indicative; final dimensions per engineering drawing. Custom configurations available.
30 kV Power Feedthrough
Compliance Power Feedthrough 30kV Model: DY-3030 kV high-voltage feedthrough with long creepage path for HV vacuum and accelerator applications.
Specifications
| Voltage Rating | 30 kV DC |
|---|---|
| Max Current | 3 – 48 A |
| Vacuum Leak Rate | UHV < 1×10⁻¹⁰ mbar·l/s |
| Flange | CF / KF |
| Number of Pins | 1 / 2 |
| Conductor Material | Copper / Nickel / Molybdenum / Stainless Steel |
| Temperature Range | -150 °C to 450 °C |
Technical Overview
High-voltage power feedthroughs pass DC power through a vacuum chamber wall using a metallized alumina ceramic insulator brazed to a metal flange and conductor. The ceramic provides high dielectric strength and a long creepage path, and the brazed joint holds a helium leak rate below 1×10⁻¹⁰ mbar·l/s.
Typical Applications
- Semiconductor etch and deposition (CVD/PVD) chambers
- Ion implantation and sputtering systems
- Electron-beam welders and X-ray equipment
- Particle accelerators and UHV research systems
Related Products
Related Products
Power Feedthroughs
1 kV Power FeedthroughCompliance Power Feedthrough 1kV
Power Feedthroughs
5 kV Power FeedthroughCompliance Power Feedthrough 5kV
Power Feedthroughs
8 kV Power FeedthroughCompliance Power Feedthrough 8kV
Power Feedthroughs
12 kV Power FeedthroughCompliance Power Feedthrough 12kV
Power Feedthroughs
E-Beam 12 kV Baseplate FeedthroughCompliance E-Beam Power Feedthrough 12kV
Power Feedthroughs
14 kV Power FeedthroughCompliance Power Feedthrough 14kV
Power Feedthroughs
