* Product images and drawings are indicative; final dimensions per engineering drawing. Custom configurations available.
20 kV Power Feedthrough
Compliance Power Feedthrough 20kV Model: DY-2020 kV DC power feedthrough, 1–4 pins, multiple lengths and flange sizes for different chamber layouts.
Specifications
| Voltage Rating | 20 kV DC |
|---|---|
| Max Current | 3 – 145 A |
| Vacuum Leak Rate | UHV < 1×10⁻¹⁰ mbar·l/s |
| Flange | CF / KF |
| Number of Pins | 1 / 2 / 3 / 4 |
| Conductor Material | Copper / Nickel / Molybdenum / Stainless Steel |
| Temperature Range | -150 °C to 450 °C |
Technical Overview
High-voltage power feedthroughs pass DC power through a vacuum chamber wall using a metallized alumina ceramic insulator brazed to a metal flange and conductor. The ceramic provides high dielectric strength and a long creepage path, and the brazed joint holds a helium leak rate below 1×10⁻¹⁰ mbar·l/s.
Typical Applications
- Semiconductor etch and deposition (CVD/PVD) chambers
- Ion implantation and sputtering systems
- Electron-beam welders and X-ray equipment
- Particle accelerators and UHV research systems
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